Development of a compact microwave ion source for ion implantation
Year: 2025
Type: article
Source: Journal of Instrumentation
Authors: Mengting Li, Yang Ma, Wenbin Wu, Xin Xu, Weiping Chen, Rongxiang Zhang, Ailin Zhang
Institution: University of Science and Technology of China
Language: English
Subfield: Aerospace Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409497588