Work

Real-time monitoring of photodegradation in photoresists using a quartz crystal microbalance

Year: 2025

Type: article

Abstract: We report a quantitative method for the real-time evaluation of photoresist performance that integrates laser irradiation with quartz crystal microbalance (QCM) sensing technology. The results obtained for the model photoresist AZ1518 correlated with the traditionally obtained ones. Furthermore, the system revealed viscoelastic transitions and shear stress evolution during photoreactions.

Source: RSC Advances

DOI: 10.1039/d4ra05762g

Authors: Zhun Gu, Kaitong Yang, Hayford Boamah, Dong Chen, Zhiqiang Zhu, Jie Wang

Institutions: Suzhou Chien-Shiung Institute of Technology, Jiangsu University

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $1,042

Funders: Government of Jiangsu Province, Natural Science Foundation of Jiangsu Province, Qinglan Project of Jiangsu Province of China