Work

Investigation of Reactive Ion Etching Processes on Mg-Based Oxide Semiconductors: MgZnO

Year: 2025

Type: article

Source: ACS Applied Electronic Materials

DOI: 10.1021/acsaelm.5c00029

Authors: Leila Ghorbani, Shreya Kundu, Jie Li, Souvik Kundu, Shankha Mukherjee, Anastasiia Kruv, Stefan De Gendt

Institutions: IMEC, KU Leuven

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409527867

FWCI: 1.127

Cites: 44

Cited by: 5

Related to: 10