Work

Two-dimensional fluid simulations of sawtooth waveform pulsed inductively coupled Ar/O2 plasma discharges

Year: 2025

Type: article

Source: Journal of Physics D Applied Physics

DOI: 10.1088/1361-6463/adce15

Authors: Ming-Liang Zhao, Chang Lu, De-Qi Wen, Yu-Ru Zhang, Fei Gao, You-Nian Wang

Institutions: Dalian University of Technology, Key Laboratory of Materials Modification by Laser, Ion and Electron Beams

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Fundamental Research Funds for the Central Universities

Awards: G4998678129, G7302644309, G8245913339

OpenAlex ID: W4409533942

FWCI: 0.924

Cites: 21

Cited by: 4

Related to: 10