Highly Sensitive Graphene MEMS Pressure Sensor with Integrated Membrane and Cross-Beam with Cavity for Extended Pressure Range Testing
Year: 2025
Type: article
Source: ACS Applied Electronic Materials
Institution: North University of China
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G1531042501, G6199585952
OpenAlex ID: W4409565715