Design and Control of a Piezo-Driven z - θx - θy Parallel Nanopositioning Stage With Two-Stage Rhombic Amplification Structure
Year: 2025
Type: article
DOI: 10.1115/1.4068477
Authors: Shengdian Zhang, Yuguo Cui, Yiling Yang, Keke Dong, Qifang Xie
Institution: Ningbo University
Language: English
Subfield: Control and Systems Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G7313726482
OpenAlex ID: W4409571403
