Work

Submicron-processing by X-ray lithography for medical mesh nebulizer

Year: 2025

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.35848/1347-4065/adce85

Authors: Taki Watanabe, Sho Amano, Yuichi Utsumi, Kazuhiro Kanda

Institution: University of Hyogo

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409577216

FWCI: 0.231

Cites: 33

Cited by: 1

Related to: 10