Work

Fabrication and testing of piezoresistive sensed cantilever probe

Year: 2025

Type: conference-paper

Source: International Conference on Mechatronic Engineering and Artificial Intelligence (MEAI)

DOI: 10.1117/12.3064220

Authors: Yue Chen, Xiuxia Wang, Chenggang Zhou, Fangfang Peng, Jinlan Peng, Dianfa Zhou

Institution: University of Science and Technology of China

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409580647

FWCI:

Cites: 6

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Related to: 10