Analysis of Conventional Robot Task Sequences During Lot Switching Periods in Cluster Tools
Year: 2025
Type: article
Authors: Jeongsun Ahn, Hyun-Jung Kim
Institution: Korea Advanced Institute of Science and Technology
Language: English
Subfield: Industrial and Manufacturing Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G8700060802
OpenAlex ID: W4409580972