Design and fabrication of metasurface for MEMS narrowband infrared light source
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3064201
Authors: Hao Li, Chenggang Zhou, Fangfang Peng, Jinlan Peng, Xiuxia Wang, Dianfa Zhou
Institution: University of Science and Technology of China
Language: English
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409581344
