Work

Compact vacuum setup for laser induced plasma etching with optical emission spectrum monitoring

Year: 2025

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/6.0004296

Authors: Lukáš Šilhan, Jon Ander Arregi, Tomáš Plichta, Ondřej Vaculík, Jan Novotný, Mojmír Šerý

Institutions: Czech Academy of Sciences, Institute of Scientific Instruments, Brno University of Technology

Language: English

Topic: Laser Material Processing Techniques

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Technology Agency of the Czech Republic

Award: Centre of Advanced Electron and Photonic Optics

OpenAlex ID: W4409584750

FWCI: 0.918

Cites: 17

Cited by: 2

Related to: 10