Fabrication of highly homogeneous metal films for hemispherical resonators by a 3D mask based on a sputter-coating process
Year: 2025
Type: article
Source: Thin Solid Films
Authors: Feng Zhu, Jia Liu, Chen Liao, Xuezhong Wu, Yan Shi, Xiang Xi
Institution: National University of Defense Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G3328123050, G6289166298, G756092636
OpenAlex ID: W4409604984