High-Performance Oxide Thin-Film Transistors with Atomic Layer Deposition-Grown HfO 2 /BeO Hetero-Dielectric
Year: 2025
Type: article
Source: Nano Letters
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G1065324744, G767668997
OpenAlex ID: W4409618038
