Preparation of mesoporous CeO2@MOF-5 abrasives for efficient polishing in chemical mechanical polishing
Year: 2025
Type: article
Source: Materials Chemistry and Physics
Authors: Jia Li, Hong Lei, Ruixing Yang
Institution: Shanghai University
Language: English
Subfield: Biomedical Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G4865744055
OpenAlex ID: W4409638348
