Work

Development of a Glassblown Micro-Hemispherical Shell Resonator With a Co-Fabricated Electrical Actuation Mechanism

Year: 2025

Type: article

Source: IEEE Electron Device Letters

DOI: 10.1109/led.2025.3562657

Authors: Wenqiang Wei, Rang Cui, Qi Cai, Renxin Wang, Huiliang Cao

Institution: North University of China

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Shanxi Provincial Postdoctoral Science Foundation, National Natural Science Foundation of China, National Key Research and Development Program of China

Awards: G2107375338, G2635865080, G2831643067, G4435827593

OpenAlex ID: W4409641242

FWCI: 0.693

Cites: 20

Cited by: 3

Related to: 10