Work

Unified inverse lithography technology (ILT) and fracturing through recurrent neural network

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3050153

Authors: Shilong Zhang, Youngsoo Shin

Institution: Korea Advanced Institute of Science and Technology

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4409655049

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Cites: 13

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Related to: 10