Hybrid mask 3D modeling driven by both physical solution and machine learning
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3051827
Authors: Rongzhang Chen, Qiugu Wang, Jiaman Liu, Yu-Ting Cao, Jiaxin Lin, Yu-Qi Wang, Dongqing Zhang, Xi Chen, Wen Lyu, Ming-Chun Tien, Leiwu Zheng, Jen-Shiang Wang, Yongfa Fan, Mu Feng
Institution: ASML (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409655060