Work

Automating rules-based OPC via scattered data interpolation

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3051474

Authors: Jakin B. Delony, Gerard Luk-Pat, Steven L. Prins, Scott W. Jessen

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409655064

FWCI: 2.293

Cites: 12

Cited by: 1

Related to: 10