Design enablement of low-cost stitching in high-NA EUV patterning
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3051566
Authors: Sagar Jain, Puneet Gupta, Pieter Woltgens
Institution: University of California, Los Angeles
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409655095