Work

A novel methodology for decomposition and stitching optimization

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3050037

Authors: Yubo Qian, Sutae Kim, Sejin Park, Youngdoo Jeon, Jinwoo Lee, Chunyeop Park, Byung-Sung Kim

Institution: Samsung Electronics (South Korea)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4409655102

FWCI:

Cites: 6

Cited by:

Related to: 10