A novel pre-processing approach for OPC using LSMR
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3050121
Authors: Masafumi Suzuki, Taiki Kimura, Jumpei Inoue, Kinji Kimura
Institutions: KIOXIA Corporation (Japan), University of Fukui
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409655105