Work

Hybrid metrology for hot spot prediction in lithographic patterning

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3053208

Authors: Mokbel Karam, Xuelong Shi, Leandro Medina, Stephen Sirard, Meghali Chopra, Ryoung-han Kim

Institution: IMEC

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409655106

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