Work

Stress evolution analysis of gate-all-around transistors: frontside and backside integration approaches

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3050355

Authors: Sumant Sarkar, QingPeng Wang, TaeYeon Oh, Sandy Wen, Ivan Chakarov, Brett Lowe, Benjamin Vincent

Institution: Lam Research (United States)

Language: English

Topic: Advancements in Semiconductor Devices and Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409655149

FWCI: 2.358

Cites: 13

Cited by: 1

Related to: 10