Work

Optimizing lithographic imaging: the interplay of optical aberrations and image performance metrics

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3051509

Authors: Dominik Schulz, Ahmad Huran, Jan Werschnik

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409655151

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Cites: 21

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Related to: 10