Machine learning-assisted pattern optimizations for fixing design for manufacturability (DFM) rule check violations
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3051488
Institutions: GlobalFoundries (United States), GlobalFoundries (Germany)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409655152
