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Accelerating high-NA introduction with ImageTuner EXE

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3052420

Authors: Steven L. Carson, Harsha Grunes, Can Guven, Todd J. Hoppe, Robert M. Bigwood, Vince Plachecki, Dezheng Sun, Paul Derks, Stephen D. Hsu, Peter D. Engblom, Sjoerd Lok

Institutions: Intel (United States), ASML (United States), ASML (Netherlands)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409655165

FWCI: 2.3

Cites: 3

Cited by: 1

Related to: 10