Probing defects in metal oxide resists with an electrical yield vehicle
Year: 2025
Type: conference-abstract
DOI: 10.1117/12.3054374
Authors: Nicole Guzman, Marie E. Krysak, Florian Gstrein, Etienne P. de Poortere, Chia-Hsien Yao, Victor Blanco, Stephane Lariviere, Bart De Wachter, Cyrus Tabery
Institutions: Intel (United States), IMEC, ASML (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409655247