Work

Enhanced EUV mask imaging using Fourier ptychographic microscopy

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3051223

Authors: Chaoying Gu, Antoine Islegen-Wojdyla, Markus P. Benk, Kenneth A. Goldberg, Laura Waller

Institutions: University of California, Berkeley, Lawrence Berkeley National Laboratory

Language: English

Topic: Advanced X-ray Imaging Techniques

Subfield: Radiation

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409655248

FWCI: 6.788

Cites: 21

Cited by: 1

Related to: 10