Work

Evolution of EUV light source architecture for continued advancements in EUV high volume manufacturing

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3052048

Authors: Qiushi Zhu, Alexander A. Schafgans, Jayson Stewart, Spencer Rich, Michael Purvis, Haining Wang, Klaus Hummler, Andrew D. LaForge, Peter Mayer, Dustin M. Urone, Omar Biabani, Andrei Dorobantu, Yue Ma, Bob Rollinger

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409655268

FWCI: 9.434

Cites: 5

Cited by: 4

Related to: 10