EUV optics portfolio extended: first high-NA systems delivered and showing excellent imaging results
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3051098
Authors: Claus Zahlten, Paul Gräupner, Peter Kürz, Olaf Conradi, Wolfgang Geyer, Jan van Schoot, Harrie van Dijck, Roel Moors, Teun van Gogh, Peter Vanoppen
Institution: ASML (Netherlands)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409655281