Optical considerations of EUVL wavelength, NA, and multilayers at large angles
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3052669
Author: Bruce W. Smith
Institution: Rochester Institute of Technology
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409655286