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Tilt induced polarization rotation and its importance in high-NA EUV lithography

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3051599

Author: Michael Yeung

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409655293

FWCI:

Cites: 4

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Related to: 10