Overlay distortion caused by backside defects: needs for improved track integrated backside cleaning towards high-NA EUV
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3050927
Authors: Jelle Vandereyken, Koen D'havé, Hyo Seon Suh, Elke Caron, Wesley Zanders, Seungjoo Baek, Andreia Santos, Shindo Satoshi, Masahiko Harumoto
Institutions: IMEC, SCREEN Semiconductor Solutions Co., Ltd. (Japan)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409655316