Work

High-sensitivity positive-tone hybrid EUV resist synthesized by vapor phase metal-oxide infiltration

Year: 2025

Type: conference-abstract

DOI: 10.1117/12.3050508

Authors: Nikhil M. Tiwale, Ashwanth Subramanian, Won-Il Lee, Xinpei Wu, Md Istiaque Chowdhury, Ming Lu, Aaron Stein, Jiyoung Kim, Chang-Yong Nam

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409655363

Cites:

Cited by: 2

Related to: 10