Work

Effects of polymer molecular weight and monomer concentration variations on resist stochastics and molecular segregation

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3050856

Authors: Eshan Dilina Thilakarathna, Gregory Denbeaux, Sakiko Enomoto, Masataka Nojima, Toshikage Asakura

Institutions: University at Albany, State University of New York, Maruzen Petrochemical Co., Ltd. (Japan)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409655449

FWCI:

Cites: 23

Cited by:

Related to: 10