Realistic 3D topography simulation for next-generation plasma processes
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3051589
Author: Yeon Ho Im
Institution: Jeonbuk National University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409655698