Work

Etching mechanisms behind grayscale 3D multi-height structures transfer for optoelectronic devices

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3051400

Authors: Aurelien Tavernier, Assia Selmouni, Nael Sylvestre, Api Warsono, Nicolas Posseme

Institutions: Commissariat à l'Énergie Atomique et aux Énergies Alternatives, Laboratoire d'Électronique des Technologies de l'Information, STMicroelectronics (France)

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409655717

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