Effect of ion angle on pattern shaping performance
Year: 2025
Type: conference-abstract
DOI: 10.1117/12.3056941
Authors: Peter Sun, Robert E. Browning, Nadjoua Moumen, Can Guven, Liwei An, Christy Hou, Tristan A. Tronic, Tricia Tighe, Sarah A. Williams, Charles H. Wallace, Yung-Chen Lin, Chihan Hsu, Norman Chen, Shurong Liang, Kevin Anglin, Huixiong Dai, Steven Sherman
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409655733