Work

Machine-Learning-Assisted Anchor Loss Reduction of MEMS Resonator With One-Dimensional Phononic Crystal Tether

Year: 2025

Type: article

Source: IEEE Transactions on Electron Devices

DOI: 10.1109/ted.2025.3559898

Authors: Wen Chen, Yuhao Xiao, Kewen Zhu, Longlong Li, Guoqiang Wu

Institutions: Hubei University, Wuhan University

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Henan Provincial Science and Technology Research Project

Awards: G3173688712, G5614451526, G847568058

OpenAlex ID: W4409659725

FWCI: 0.723

Cites: 28

Cited by: 3

Related to: 10