Work

Low GWP and low emission gas for BEOL ILD trench patterning

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3056938

Authors: Scott Biltek, Nathan Stafford, Phong Nguyen

Institution: Air Liquide (United States)

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Responsible consumption and production

Open Access status: closed

OpenAlex ID: W4409677330

FWCI:

Cites: 2

Cited by:

Related to: 10