Work

Kinetic simulations of low-temperature plasmas used for plasma processing: ICP and feature-scale models

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3051548

Authors: Daniel Main, Thomas G. Jenkins, Eve Lanham, Scott E. Kruger, John R. Cary

Institution: Tech-X Corporation (United States)

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409677363

FWCI: 2.3

Cites: 13

Cited by: 1

Related to: 10