Work

The semiconductor supply chain in an era of low GWP and/or PFAS-free gas chemistries

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3058167

Authors: Eric A. Joseph, Nathan Marchack, Robert L. Bruce, Jed Pitera, Teo Todorov, Dan Sanders

Institutions: IBM (United States), IBM Research - Thomas J. Watson Research Center, IBM Research - Almaden

Language: English

Topic: Per- and polyfluoroalkyl substances research

Subfield: Environmental Chemistry

Field: Environmental Science

Domain: Physical Sciences

SDGs: Responsible consumption and production, Climate action, Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4409677388

FWCI:

Cites: 11

Cited by:

Related to: 10