Mechanistic studies of positive-tone organoantimony resists
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3051499
Authors: Jordan Greenough, Nitinkumar S. Uphadyay, Shaheen Hasan, Munsaf Ali, Ricardo Burke, Stephen Smith, Greg Denbeaux, Robert L. Brainard
Institution: University at Albany, State University of New York
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409677406