Wafer shape control in semiconductor manufacturing
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3051168
Authors: Pradeep K. Subrahmanyan, Ram Karur, Wonjae Lee, Olga Kucher, Changwoo Sun, Adaeze Osonkie, Heedon Hwang, Woosung Lee, Sang H. Rha, Jeseon Yeon, Hanmei Choi, Iksoo Kim
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409677679