Work

Treatment of PFAS substances in lithography

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3050904

Authors: Shinji Kobayashi, Ryo Suemasa, Kunie Ogata

Institutions: Tokyo Electron Kyushu Ltd (Japan), Tokyo Electron (Japan)

Language: English

Topic: Per- and polyfluoroalkyl substances research

Subfield: Environmental Chemistry

Field: Environmental Science

Domain: Physical Sciences

SDGs: Responsible consumption and production, Clean water and sanitation

Open Access status: closed

OpenAlex ID: W4409678580

FWCI: 13.7

Cites: 5

Cited by: 1

Related to: 10