Work

New generation spin on carbon for device scaling

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3050989

Authors: Jun Kosai, Hikaru Tokunaga, Tomohiro Iwaki, Tomonori Okada

Institutions: Nissan Chemical Corporation (Japan), Micron (United States)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409679196

FWCI: 2.358

Cites: 8

Cited by: 1

Related to: 10