Work

Chemical stochastic variability in compact stochastic e-beam mask writing and EUV models

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3051580

Authors: Azat M. Latypov, Ingo Bork, Stewart Wu, Germain L. Fenger

Institution: Siemens (Belgium)

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409679205

FWCI:

Cites: 6

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Related to: 10