A comprehensive analysis to quantify the performance evolution of EUV photoresists
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3052265
Authors: Mihir Gupta, Sara Paolillo, Bhavishya Chowrira Poovanna, Joern-Holger Franke, Stefan Decoster, Achintya Kundu, Nadia Vandenbroeck, Hyo Seon Suh, Danilo De Simone
Institution: IMEC
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4409679223