Work

Semiconductor technology roadmaps and lithography implications

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3052298

Authors: Karey Holland, Steven P. Holland

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4409679226

FWCI: 2.293

Cites: 3

Cited by: 1

Related to: 10