Work

Vapor-phase metal infiltration for inorganic-organic hybrid extreme ultraviolet lithography resists

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3051154

Authors: Md Istiaque Chowdhury, Xinpei Wu, Won-Il Lee, Gregrey Swieca, Michael J. Eller, Mueed Ahmad, J. Anibal Boscoboinik, Aaron Stein, Jiyoung Kim, Nikhil M. Tiwale, Chang-Yong Nam

Institutions: Brookhaven National Laboratory, Stony Brook University, California State University, Northridge, The University of Texas at Dallas

Language: English

Topic: Advancements in Photolithography Techniques

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4409679232

FWCI: 4.601

Cites:

Cited by: 2

Related to: 10